✦ LIBER ✦
Stress measurements in silicon devices through Raman spectroscopy: Bridging the gap between theory and experiment
✍ Scribed by De Wolf, Ingrid; Maes, H. E.; Jones, Stephen K.
- Book ID
- 120061631
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 447 KB
- Volume
- 79
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.361485
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