✦ LIBER ✦
Stress field in sputtered thin films: Ion irradiation as a tool to induce relaxation and investigate the origin of growth stress
✍ Scribed by Debelle, A.; Abadias, G.; Michel, A.; Jaouen, C.
- Book ID
- 111876813
- Publisher
- American Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 410 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0003-6951
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