Stress-dependent transformation of interstitial oxygen in processed Ge-doped Cz-Si

✍ Scribed by A. Misiuk; C.A. Londos; J. Bak-Misiuk; Deren Yang; W. Jung; M. Prujszczyk

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 485 KB
• Volume: 253
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.10.028