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Stress dependence of oxygen diffusion in ZrO2 film

โœ Scribed by Yamamoto, Yasunori; Morishita, Kazunori; Iwakiri, Hirotomo; Kaneta, Yasunori


Book ID
122055955
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
541 KB
Volume
303
Category
Article
ISSN
0168-583X

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A series of polyimide/zirconia (PI/ZrO 2 ) hybrid films were synthesized based on zirconium n-butoxide, pyromellitic acid dianhydride (PMDA) and 4,4 -oxydianiline (ODA) by a sol-gel process. The atomic oxygen (AO) exposure tests were carried out using a ground-based atomic oxygen effects simulation