✦ LIBER ✦
Stress characterization of device layers and the underlying Si1−xGexvirtual substrate with high-resolution micro-Raman spectroscopy
✍ Scribed by W. M. Chen; P. J. McNally; G. D. M. Dilliway; J. Bonar; T. Tuomi; A. F. W. Willoughby
- Book ID
- 111537512
- Publisher
- Springer US
- Year
- 2003
- Tongue
- English
- Weight
- 255 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0957-4522
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