✦ LIBER ✦
Stress and internal friction associated with light-induced structural changes of a-Si:H deposited on crystalline silicon microcantilevers
✍ Scribed by E Stratakis; E Spanakis; H Fritzsche; P Tzanetakis
- Book ID
- 117150328
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 134 KB
- Volume
- 266-269
- Category
- Article
- ISSN
- 0022-3093
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