✦ LIBER ✦
Stress analysis of SiO2/Si bi-metal effect in silicon accelerometers and its compensation
✍ Scribed by H. Muro; H. Kaneko; S. Kiyota; P.J. French
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 398 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0924-4247
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