✦ LIBER ✦
Strained-silicon MOSFET process technology—control of impurity and germanium atoms at the hetero-interface
✍ Scribed by Nobuyuki Sugii; Yoshinobu Kimura; Shin’ichiro Kimura; Shigefumi Irieda; Jun Morioka; Taroh Inada
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 320 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1369-8001
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