Strain relaxation in epitaxial Si1−xGex/Si(100) layers induced by reaction with palladium

✍ Scribed by A. Buxbaum; E. Zolotoyabko; M. Eizenberg; F. Schäffler

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 412 KB
• Volume: 222
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(92)90059-k