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Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction

✍ Scribed by A. Armigliato; R. Balboni; S. Frabboni; A. Benedetti; A.G. Cullis; G.P. Carnevale; P. Colpani; G. Pavia

Book ID: 104420502
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 167 KB
Volume: 4
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(00)00146-3

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