✦ LIBER ✦
Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 12C, 16O, 35Cl, 79Br and 127I ions
✍ Scribed by Mizohata, K.; Räisänen, J.; Keinonen, J.; Härkönen, E.; Palmans, J.; Ritala, M.
- Book ID
- 123446671
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 441 KB
- Volume
- 300
- Category
- Article
- ISSN
- 0168-583X
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