✦ LIBER ✦
Stoichiometry determination of reactively sputtered titanium-silicide: H-O Blom et al,Vacuum, 32 (10/11), 1982, 665–667
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 175 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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