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Stitching-error reduction in gratings by shot-shifted electron-beam lithography

โœ Scribed by Dougherty, D.J.; Muller, R.E.; Maker, P.D.; Forouhar, S.


Book ID
115370239
Publisher
Optical Society of America
Year
2001
Tongue
English
Weight
140 KB
Volume
19
Category
Article
ISSN
0733-8724

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