A piezo-driven compliant stage with doub
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Kee-Bong Choi; Jae Jong Lee; Seiichi Hata
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Article
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2010
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Elsevier Science
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English
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This paper proposes a novel piezo-driven compliant stage for long travel range with nano-motion. For long travel range, the piezo-driven compliant stage requires mechanical amplification mechanisms due to the short displacement of its stack-type piezoelectric element. The piezo-driven compliant stag