✦ LIBER ✦
Steric and electronic interactions between source gas and substrate surface during the Al-CVD/Al selective epitaxy process as investigated by quantum chemical calculations
✍ Scribed by R. Vetrivel; R. Yamauchi; H. Yamano; M. Kubo; A. Miyamoto; T. Ohta
- Book ID
- 103617604
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 739 KB
- Volume
- 82-83
- Category
- Article
- ISSN
- 0169-4332
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