✦ LIBER ✦
Stereoscopic observation and determination of surface orientation of voids in stress-thermal-migrated aluminum lines of LSI with UHVEM
✍ Scribed by Akio Takaoka; Katsumi Ura
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 488 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0304-3991
No coin nor oath required. For personal study only.