Stereo Laser Micromachining of Silicon: Bloomstein, T. M.; Ehrlich, D. J. Applied Physics Letters. 1992 Aug 10; 61(6): 708–710

• Book ID: 103530847
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 135 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90091-n