✦ LIBER ✦
Stepwise Growth of Ultrathin SiO x Films on Si(100) Surfaces through Sequential Adsorption/Oxidation Cycles of Alkylsiloxane Monolayers
✍ Scribed by Brunner, H.; Vallant, T.; Mayer, U.; Hoffmann, H.
- Book ID
- 127351796
- Publisher
- American Chemical Society
- Year
- 1996
- Tongue
- English
- Weight
- 137 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0743-7463
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