✦ LIBER ✦
Stepping motor adaptor actuator for a commercial UHV linear motion feedthrough
✍ Scribed by M. Iarocci; T. Oversluizen
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 194 KB
- Volume
- 291
- Category
- Article
- ISSN
- 0168-9002
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