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Statistical Simulation for Process Design and Optimization in IC Manufacture

✍ Scribed by A. A. Kouleshoff; V. S. Malyshev; V. V. Nelayev; V. R. Stempitsky


Book ID
110412036
Publisher
Springer
Year
2003
Tongue
English
Weight
331 KB
Volume
32
Category
Article
ISSN
1063-7397

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