Statistical control of VLSI fabrication processes: a framework : Purnendu K. Mozumber, C. R. Shyamsundar and Andrzej J. Strojwas. IEEE Trans. Semiconductor Mfg 1(2), 62 (1988)

• Book ID: 103285753
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 128 KB
• Volume: 29
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(89)90269-2