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State-space modeling of the radio frequency inductively-coupled plasma generator

โœ Scribed by Dewangan, Rakesh Kumar; Punjabi, Sangeeta B; Joshi, N K; Barve, D N; Mangalvedekar, H A; Lande, B K


Book ID
121497442
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
630 KB
Volume
208
Category
Article
ISSN
1742-6588

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