Stacking faults in silicon epitaxial layers : H. Aharoni. Vacuum26 (4/5), 167 (1976)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 135 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(76)90565-5