✦ LIBER ✦
Stabilization of ultra-thin Pt bottom electrode for 0.15 μm cup-type BST capacitor
✍ Scribed by Tsuzumtani, Akihiko; Okuno, Yasutoshi; Yamanaka, Michinari; Mori, Yoshihiro
- Book ID
- 126625603
- Publisher
- Taylor and Francis Group
- Year
- 2001
- Tongue
- English
- Weight
- 555 KB
- Volume
- 38
- Category
- Article
- ISSN
- 1058-4587
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