✦ LIBER ✦
Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement
✍ Scribed by Yokota, Masayuki ;Asaka, Atsuyoshi ;Yoshino, Toshihiko
- Book ID
- 115350610
- Publisher
- The Optical Society
- Year
- 2003
- Tongue
- English
- Weight
- 252 KB
- Volume
- 42
- Category
- Article
- ISSN
- 1559-128X
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