✦ LIBER ✦
Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers
✍ Scribed by Jay J. Senkevich; B. Wang; J. B. Fortin; M. C. Nielsen; J. F. McDonald; T. -M. Lu; G. M. Nuesca; G. G. Peterson; S. C. Selbrede; M. T. Weise
- Book ID
- 107453083
- Publisher
- Springer US
- Year
- 2003
- Tongue
- English
- Weight
- 739 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0361-5235
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