✦ LIBER ✦
Stability of DRAM-devices with respect to 75 keV helium ion beam irradiation as required for ion projection lithography of critical layers
✍ Scribed by S. Hirscher; M. Kümmel; A. Wolter; R. Kaesmaier; A. Jaeschke
- Book ID
- 114155455
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 240 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
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