Stability of Bilayer Films of YBa2Cu3O7 and Y-ZrO2 Grown on LaAlO3 by Pulsed Organometallic Beam Epitaxy

✍ Scribed by Forrest H. Kaatz; Paul R. Markworth; Ji-Yan Dai; D. Bruce Buchholz; Xiang Liu; Michael P. Chudzik; John A. Belot; Carl R. Kannewurf; Tobin J. Marks; Robert P. H. Chang

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 609 KB
• Volume: 4
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199805)04:03<99::aid-cvde99>3.0.co;2-7

✦ Synopsis

Fig. 3. Variation of the driving force ∆m C with temperature at X "Cr(C 6 H 6 ) 0.2 " = 3.5 × 10 -2 for different values of total pressure.

To summarize, we approximated the chemical potential of carbon in the MOCVD of chromium carbides from Cr(C 6 H 6 ) 2 by the value determined at the gas phase equilibrium where the condensed phase is excluded in the minimization of the Gibbs energy. By applying this model to the local conditions in the vicinity of the growing surface, as defined in a previous paper, [2] we added iso-supersaturation and iso-activity lines to conventional stability or CVD diagrams, and we evaluated the dependence of the supersaturation and the driving force for the deposition of free carbon on the CVD independent variables.