Investigation of the on-chip MISM interc
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Bo Yang; Xi Shao; Neil Goldsman; Omar M. Ramahi; Parvez N. Guzdar
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Article
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2011
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John Wiley and Sons
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English
⚖ 869 KB
## Abstract The alternating‐direction‐implicit finite‐difference time‐domain method is used to analyze the Metal‐Insulator‐ Semiconductor‐Metal interconnects by solving Maxwell's equations in the time domain. The dielectric quasi‐TEM mode, the slow wave mode, and the skin‐effect mode are all analyz