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Sputtering yields of carbon based materials under high particle flux with low energy

✍ Scribed by K. Nakamura; A. Nagase; M. Dairaku; M. Akiba; M. Araki; Y. Okumura


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
323 KB
Volume
220-222
Category
Article
ISSN
0022-3115

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