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Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar + / ${\rm CF}_3^+$ ion bombardment with vacuum ultraviolet (VUV) photon irradiation

✍ Scribed by Yoshimura, Satoru; Tsukazaki, Yasuhiro; Kiuchi, Masato; Sugimoto, Satoshi; Hamaguchi, Satoshi


Book ID
121267502
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
488 KB
Volume
45
Category
Article
ISSN
0022-3727

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