✦ LIBER ✦
Sputtering yield coefficients of thin copper films bombarded by 3–15 keV Ar+ at an angle of incidence of 30°
✍ Scribed by C. Abatino; G. Luzzi; L. Papagno
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 404 KB
- Volume
- 56
- Category
- Article
- ISSN
- 0040-6090
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