Sputtering under ultrahigh vacuum environment : G. Peter, J. A. Koprio and R. Slepicka. Vacuum 38(8–10), 795 (1988)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 116 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90101-r