✦ LIBER ✦
Sputtering techniques applied to realization of ultrathin layered stacks (of the order of nanometres): in situ ellipsometry control system
✍ Scribed by P Houdy; E Ziegler; L Névot
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 570 KB
- Volume
- 141
- Category
- Article
- ISSN
- 0040-6090
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