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Sputtering of tungsten by oxygen at temperatures up to 1900 K

✍ Scribed by E. Hechtl; W. Eckstein; J. Roth; J. Laszlo


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
380 KB
Volume
179-181
Category
Article
ISSN
0022-3115

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