Sputtering of tungsten by oxygen at temperatures up to 1900 K
β Scribed by E. Hechtl; W. Eckstein; J. Roth; J. Laszlo
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 380 KB
- Volume
- 179-181
- Category
- Article
- ISSN
- 0022-3115
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