Sputtering of TiC coating by low-energy and high flux plasma bombardment in PISCES

✍ Scribed by E. Franconi; F. Brossa

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 368 KB
• Volume: 179-181
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(91)90084-k