Influence of composition and structural
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D. Munteanu; C. Ionescu; C. Olteanu; A. Munteanu; F. Davin; L. Cunha; C. Moura;
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Article
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2010
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Elsevier Science
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English
β 636 KB
Within the frame of this work, low temperature Ti-Si-C films were deposited on high-speed steel and stainless steel substrates by combined dc/rf magnetron co-sputtering. Composition analysis revealed the existence of two distinct regions: (i) a silicon doped sub-stoichiometric titanium carbide zone