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Sputtering of potassium chloride by H, He, and Ar ions

✍ Scribed by J.P. Biersack; E. Santner


Publisher
Elsevier Science
Year
1976
Weight
687 KB
Volume
132
Category
Article
ISSN
0029-554X

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Degradation of polyimide by implantation
✍ V. SvorcΓ­k; V. Rybka; V. Hnatowicz; I. Miček; O. Jankovskij; R. Γ–chsner; H. Ryss πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 198 KB πŸ‘ 2 views

Polyimide (PI) samples were irradiated with 200 keV Ar / ions to fluences from 5 1 10 13 -1 1 10 17 cm 02 and the concentration depth profiles of implanted Ar atoms as well as of carbon and oxygen atoms of the polymer matrix were determined using the Rutherford backscattering technique. The surface