Sputtering of copper atoms by keV atomic and molecular ions: A comparison of experiment with analytical and computer based models

✍ Scribed by D.R. Gillen; W.G. Graham; A Goelich

• Book ID: 114165908
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 145 KB
• Volume: 194
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)00786-3