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Sputtering-induced surface roughness of metallic thin films

✍ Scribed by D. Marton; J. Fine

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 600 KB
Volume: 185
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90008-2

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