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Sputtering effects in hexagonal silicon carbide

✍ Scribed by J. Pezoldt; B. Stottko; G. Kupris; G. Ecke

Book ID: 103954501
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 363 KB
Volume: 29
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)04005-o

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