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Sputtering and surface structure modification of gold thin films deposited onto silicon substrates under the impact of 20–160keV Ar+ ions

✍ Scribed by Mammeri, S.; Ouichaoui, S.; Ammi, H.; Dib, A.


Book ID
125825307
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
792 KB
Volume
337
Category
Article
ISSN
0168-583X

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