Sputtering and chemical erosion during CNx synthesis by ion beam assisted filtered cathodic arc evaporation

✍ Scribed by C. Spaeth; U. Kreissig; F. Richter

• Book ID: 114086813
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 291 KB
• Volume: 355-356
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(99)00482-4