✦ LIBER ✦
Sputtered flux distribution on the substrate in electron cyclotron resonance sputtering simulation and experimental study
✍ Scribed by Deenamma Vargheese, K.; Mohan Rao, G.
- Book ID
- 115454187
- Publisher
- American Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 379 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.373021
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