Sputter deposition of refractory metal silicides from cold-pressed vacuum-sintered targets

✍ Scribed by C.G. Sridhar; R. Chow; G. Nocerino

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 442 KB
• Volume: 140
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(86)90158-6