✦ LIBER ✦
Sputter deposition of dielectric films using a magnetic field for protection from high energy electrons
✍ Scribed by M.N. Khan
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 165 KB
- Volume
- 124
- Category
- Article
- ISSN
- 0040-6090
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