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Sputter deposition of dense diamond-like carbon films at low temperature

โœ Scribed by Cuomo, Jerome J.; Doyle, James P.; Bruley, John; Liu, Joyce C.


Book ID
120399268
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
635 KB
Volume
58
Category
Article
ISSN
0003-6951

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