✦ LIBER ✦
Sputter-deposition by a new Penning-discharge source with an axially integrated hot-cathode
✍ Scribed by Fumiya Shoji; Akio Ogawa; Kenjiro Oura
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 212 KB
- Volume
- 48-49
- Category
- Article
- ISSN
- 0169-4332
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