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Sputter deposition and computational study of M-TiO2 (M = Nb, Ta) transparent conducting oxide films

✍ Scribed by De-ming Chen; Gang Xu; Lei Miao; Setsuo Nakao; Ping Jin

No coin nor oath required. For personal study only.

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Sputter deposition and computational study of M-TiO2 (M&#xa0;=&#xa0;Nb, Ta) transparent conducting oxide films