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Sputter-deposited WBx films

✍ Scribed by J Willer; S Pompl; D Ristow

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 434 KB
Volume: 188
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90201-n

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